European Open Procedure Tender, Divided Into N. 2 Lots, For Supply And Installation Of Equipment For The Strengthening Of The Micro Nano Facility Of The Bruno Kessler Foundation As Part Of The Ipcei Microelectronics 2 Mc2 Project Initiative Lot 1: Stepper System For Krf Lithography Lot 2: Coating And Development System For Lithographic Processes